The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2003
Filed:
Sep. 06, 2000
Sakae Nakatsuka, Yamanashi-Ken, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A vacuum process system having a vacuum process container. Located inside the vacuum process container is a supporting table for supporting thereon an object to be processed, a presser member for pressing the top surface of the peripheral portion of the object onto the supporting table, and a shower head facing the supporting table. The shower head has a large number of gas nozzles in the bottom face thereof. The bottom face of the shower head has a facing portion positioned substantially directly above the inner peripheral edge of the presser member and a non-facing portion. The facing portion has nozzles with larger diameters than the non-facing portion or a higher density of nozzles than the non-facing portion.