The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2003
Filed:
Aug. 09, 2002
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A pressure sensor includes a diaphragm having a first surface receiving pressure, and a first thermal detection section opposed to a central section of the diaphragm through a spacer and having a thermo-sensitive resistance section, and a second thermal detection section opposed to an end section of the diaphragm and having a thermo-sensitive resistance section, wherein the first thermo-sensitive resistance section and second thermo-sensitive resistance section are connected to independent, adjustable constant-current sources, respectively, and are connected to a differential amplifier which amplifies a difference between (i) a voltage of the first thermal detection section, which detects a displacement quantity of the diaphragm due to pressure change as a displacement quantity of a thermal equilibrium state by the thermal detection section, and (ii) a voltage of the second thermal detection section, which does not change according to pressure. The sensor can measure pressure with high accuracy.