The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2003
Filed:
May. 14, 2001
Shui-Chin Huang, Tainan, TW;
Winbond Electronics Corporation, Hsinchu, TW;
Abstract
The present invention relates to discloses a manufacturing method of a gate-split flash memory, which is suitable for a self-align contact process and fully-salicide-compatible process. The present invention masks the invalid peaks with a thick passivation layer to obtain the purpose of removing the invalid peaks in the manufacturing process of a gate-split flash memory. The present invention deposits a nitride spacer to define a pattern of a floating gate of the flash memory, so that a channel length of the floating gate can be finely defined. The present invention also utilizes a mask pattern to define the floating gate region of the flash memory, and the manufacturing process will be smooth and cheap.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile