The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2003
Filed:
Apr. 22, 2002
Claudia J. Quigley, Lexington, MA (US);
Santhi E. Mathew, Londonderry, MA (US);
Leonid Mindlin, South Natick, MA (US);
James M. Poulin, Derry, NH (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
A method is disclosed for providing transient temperature compensation in a pressure transducer. The transducer includes a capacitive pressure sensor, the pressure sensor including a diaphragm, at least part of the diaphragm moving in response to changes in a pressure. The transducer may further include an electronic circuit which generates an uncompensated output signal representative of the pressure. The disclosed method generates a compensated output signal according to a function of the uncompensated output signal and a difference between a temperature of the pressure sensor and a temperature of the ambient environment.