The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2003
Filed:
Oct. 11, 2001
Applicant:
Inventor:
Qing-Tang Jiang, Austin, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/144 ;
U.S. Cl.
CPC ...
H01L 2/144 ;
Abstract
A method of fabricating an integrated circuit. A thin liner ( ) is deposited over dielectric layer including within a trench ( ) and/or via ( ). The thin liner ( ) smoothes the sidewalls of the trench ( ) and/or via ( ) and reduces resistivity. The thin liner may comprise an organic or inorganic dielectric ( ) or metal ( ). A copper interconnect structure ( ) is then formed over the thin liner ( ).