The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 24, 2003

Filed:

Jun. 12, 2001
Applicant:
Inventors:

Yoshikazu Miyajima, Utsunomiya, JP;

Tsuneo Takashima, Utsunomiya, JP;

Yukio Takabayashi, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 2/758 ; G03B 2/762 ; G03B 2/742 ;
U.S. Cl.
CPC ...
G03B 2/758 ; G03B 2/762 ; G03B 2/742 ;
Abstract

A stage device includes a movable body, movable along a guide surface, for moving an element mounted on the movable body, a static pressure bearing, having at least one pad, for guiding the movable body along the guide surface, the at least one pad being attached to the movable body at a first position, and a linear motor, having a movable part and a relatively stationary part, for moving the movable body, the movable part of the linear motor being attached to the movable body at a second position. The movable body has a hollow structure at at least one of the first position and the second position. The hollow structure has an enclosure structure or a rib structure.


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Miyajima, Yoshikazu. (2003). Stage device, an exposure apparatus and a device manufacturing method using the same (U.S. Patent No. 6583859). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6583859

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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