The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2003
Filed:
Sep. 07, 2001
Applicant:
Inventors:
Yuji Harada, Kubiki-mura, JP;
Jun Watanabe, Kubiki-mura, JP;
Jun Hatakeyama, Kubiki-mura, JP;
Yoshio Kawai, Kubiki-mura, JP;
Masaru Sasago, Osaka, JP;
Masayuki Endo, Osaka, JP;
Shinji Kishimura, Itami, JP;
Michitaka Ootani, Kawagoe, JP;
Satoru Miyazawa, Kawagoe, JP;
Kentaro Tsutsumi, Kawagoe, JP;
Kazuhiko Maeda, Tokyo, JP;
Assignee:
Other;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 ; C08F / ;
U.S. Cl.
CPC ...
G03F 7/004 ; C08F / ;
Abstract
An acrylate resin containing fluorinated alkyl groups in ester side chains has high transmittance to VUV radiation. A resist composition using the resin as a base polymer is sensitive to high-energy radiation, has excellent sensitivity and resolution, and is suited for lithographic microprocessing.