The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2003
Filed:
Apr. 28, 2000
Applicant:
Inventors:
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 ;
U.S. Cl.
CPC ...
G01B 9/02 ;
Abstract
An evaluation light from a light source is split to obtain a divided evaluation signal and a reference signal , the divided evaluation signal and the reference signal being shone, respectively, onto a sample surface and a reference surface that is made of the same material as the sample, after which a reflected divided evaluation signal and a reflected reference signal , which are reflected respectively on the sample surface and the reference surface , are caused to interfere for analysis of the sample surface