The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2003
Filed:
May. 12, 2000
Masayuki Kuwabara, Mitaka, JP;
Tokyo Seimitsu Co., Ltd., Tokyo, JP;
Abstract
An appearance inspection method, and an-apparatus therefor, capable of acquiring high quality in-focus images throughout the entire zone of an inspection object, by acquiring simultaneously two images on different focal planes by.using two TDI cameras ( ) having a sensitivity in a respective wavelength band (&lgr; ), slicing the images in accordance with a region division that is defined in advance, and comparing the images. According to another aspect of this invention, the images are acquired by a confocal microscope constituted by disposing two corresponding pin-holes ( ), on the illumination side of a microscope and its light reception side, and one TDI camera ( ).