The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2003
Filed:
Feb. 01, 2002
Yoshiki Kida, Kawasaki, JP;
Kenji Nishi, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An object of the invention is to provide a substrate transport apparatus which enables prompt transfer of a substrate, and a substrate processing apparatus incorporating this. A substrate transport apparatus of the invention comprises a transport arm ( ) for supporting a peripheral portion of a substrate (W) at at least two places on the peripheral portion, and transporting the substrate to a stage ( ). The transport arm comprises: a first arm ( ) having a first support portion ( ) for supporting a rear face of one side of the peripheral portions of the substrate in a transport direction (C-D) of the substrate, and a first facing portion ( ) provided on the first support portion and facing a side face of the one peripheral portion of the substrate; a second arm ( ) having a second support portion ( ) for supporting a rear face of the other side of the peripheral portions of the substrate in the transport direction of the substrate, and a second facing portion ( ) provided on the second support portion, and facing a side face of the other peripheral portion of the substrate; and a drive mechanism ( ) for driving each of the first arm and the second arm so as to approach and separate from each other.