The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 10, 2003

Filed:

Sep. 07, 1999
Applicant:
Inventors:

Joseph Rapisarda, Chandler, AZ (US);

Timothy Colley, Tempe, AZ (US);

Assignee:

SpeedFam-IPEC Corporation, Chandler, AZ (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
E04C 2/42 ;
U.S. Cl.
CPC ...
E04C 2/42 ;
Abstract

A clean room which uses a perforated floor upon which equipment can be directly placed is presented. The perforated floor includes a regular array of openings through which air can pass to an underlying facility room. The openings are covered by a grate through which the air can pass. In combination the perforated floor and the grates are able to support equipment in any location thereon.


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