The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 03, 2003

Filed:

Sep. 06, 2001
Applicant:
Inventor:

Ming-Jing Ho, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 2/188 ;
U.S. Cl.
CPC ...
G01N 2/188 ;
Abstract

A method of determining the correctness of a DRAM redundancy repair. The method is capable of detecting whether a redundancy repair has been properly conducted. The method includes illuminating a die on a wafer with a convergent light beam and observing the physical bit map produced after illumination on a screen. When the convergent light beam aims at a defective array, two semicircular shaped images appear on the screen. When the convergent light beam aims at a redundancy element used in a redundancy repair, a bright line appears on the screen. Through gauging the relative positions between the bright line and the pair of semicircular images, proper replacement by a redundancy element can be ascertained.


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