The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6573163 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 03, 2003

Filed:

Jan. 29, 2001
Applicant:
Inventors:

Apostolos Voutsas, Vancouver, WA (US);

John W. Hartzell, Camas, WA (US);

Yukihiko Nakata, Nara, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/120 ; H01L 2/100 ;
U.S. Cl.
CPC ...
H01L 2/120 ; H01L 2/100 ;
Abstract

A method is provided to optimize the channel characteristics of thin film transistors (TFTs) on polysilicon films. The method is well suited to the production of TFTs for use as drivers on liquid crystal display devices. The method is also well suited to the production of other devices using polysilicon films. Regions of polycrystalline silicon can be formed with different predominant crystal orientations. These crystal orientations can be selected to match the desired TFT channel orientations for different areas of the device. The crystal orientations are selected by selecting different mask patterns for each of the desired crystal orientation. The mask patterns are used in connection with lateral crystallization ELA processes to crystallize deposited amorphous silicon films.


Find Patent Forward Citations

Voutsas, Apostolos. (2003). Method of optimizing channel characteristics using multiple masks to form laterally crystallized ela poly-si films (U.S. Patent No. 6573163). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6573163

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