The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2003
Filed:
Apr. 11, 2001
Applicant:
Inventors:
Ismail Emesh, Gilbert, AZ (US);
Saket Chadda, Phoenix, AZ (US);
Nikolay Korovin, Phoenix, AZ (US);
Brian Mueller, Chandler, AZ (US);
Assignee:
SpeedFam-IPEC Corporation, Chandler, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25B 9/00 ; C25D 5/00 ; C25D 5/02 ; C25D 5/52 ; C25P 1/700 ;
U.S. Cl.
CPC ...
C25B 9/00 ; C25D 5/00 ; C25D 5/02 ; C25D 5/52 ; C25P 1/700 ;
Abstract
An electrochemical deposition apparatus and method for depositing a material onto a surface of a workpiece and for polishing the material are disclosed. The apparatus includes a platen and a polishing surface, including a conductive material and conductors embedded therein, disposed proximate the platen. During material deposition, a bias is applied across the conductor and the platen to cause deposition of material onto the workpiece surface.