The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2003
Filed:
Jun. 06, 2001
Seonghun Cho, Santa Clara, CA (US);
Shao-Po Wu, Portola Valley, CA (US);
Numerical Technologies, Inc., San Jose, CA (US);
Abstract
One embodiment of the invention provides a method and a system for using phase shifter cutbacks to resolve conflicts between phase shifters during creation of a mask to be used in an optical lithography process for manufacturing an integrated circuit. The system works by locating a plurality of phase shifters, including a first phase shifter and a second phase shifter, on a phase shifting mask, and then identifying a conflict area wherein a conflict is likely to occur between the first phase shifter and the second phase shifter on the phase shifting mask. The system resolves this conflict by cutting back one or both of the first phase shifter and the second phase shifter, so that the first phase shifter and the second phase shifter do not interfere with each other in the conflict area.