The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2003
Filed:
Feb. 28, 2001
Applicant:
Inventor:
Koji Egashira, Tosu, JP;
Assignee:
Tokyo Electron Limited, Tokyo-To, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/00 ; B05C 1/302 ;
U.S. Cl.
CPC ...
B08B 3/00 ; B05C 1/302 ;
Abstract
A rotor ( ) includes a pair of flanges ( ), four fixed holding bars ( ) fixed to the flanges ( ), and two movable holding bars ( ) supported for turning on the flanges ( ). The holding bars ( ) are provided in their surfaces with positioning grooves ( ) for positioning and holding wafers (W). The holding bars ( ) are provided with drain grooves ( ) connected to the positioning grooves ( ). The drain grooves ( ) prevent a processing liquid from staying in the positioning grooves ( ).