The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2003
Filed:
Oct. 16, 2001
Applicant:
Inventors:
Yoram Uziel, Yodfat, IL;
Natalie Levinsohn, Hadera, IL;
David Yogev, Haifa, IL;
Yehuda Elisha, Kfar Vradim, IL;
Yitzhak Ofer, Kiryat Tivon, IL;
Lev Fris Man, Zichron Yaakov, IL;
Jonathan Baron, Haifa, IL;
Assignee:
Oramir Semiconductor Equipment Ltd., Yokneam, IL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B44C 1/22 ; B23K 2/600 ;
U.S. Cl.
CPC ...
B44C 1/22 ; B23K 2/600 ;
Abstract
Particles are removed from the surface of a substrate. Respective position coordinates of the particles on the surface are determined. A beam of electromagnetic energy is directed at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at the surface causes the particles to be dislodged from the surface substantially without damage to the surface itself.