The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2003
Filed:
Apr. 18, 2001
Takeo Oomori, Hachioji, JP;
Koichiro Komatsu, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
The present invention aims of preventing a diffracted light, in testing to detect a foreign substance or a flaw on a tested substrate having a repeated pattern, from entering the eye of the observer or a light receiving optical system to be hindrance to the defect test, by providing a defect testing apparatus which comprising: a light source; an illumination optical system for applying a light flux from the light source onto a tested substrate having a repeated pattern at a predetermined angle of incidence; a light receiving optical system for receiving a scattered light from the tested substrate; an image pick-up device for picking up an image formed by the light receiving optical system; a display device for displaying the image obtained by the image pick-up device; and a test stage for mounting the tested substrate thereon at the time of testing, wherein the tested substrate and the illumination optical system are arranged to be rotatable relatively to each other.