The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2003
Filed:
May. 24, 2001
Hiroshi Nagasaka, Kanagawa, JP;
Momoko Kakutani, Tokyo, JP;
Matsuho Miyasaka, Kanagawa, JP;
Tadashi Kataoka, Chiba, JP;
Ebara Corporation, Tokyo, JP;
Abstract
The invention aims to provide a hard film which is improved in high-temperature corrosion resistance without impairing high sliding characteristics (wear resistance, low frictional coefficient) inherent in a titanium nitride thin film and which is suitable for a slide member such as a bearing or a seal used in rotary machines operated at a high temperature, such as a steam turbine and a gas turbine. For attaining this aim, the invention provides a Cr-containing titanium nitride film which is composed of a nitride containing Ti and Cr as main components, the crystal particles thereof having a face-centered cubic crystal structure, and the crystal thereof being highly oriented toward (200) face.