The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2003
Filed:
Apr. 05, 2000
Applicant:
Inventors:
Peter K. Loewenhardt, San Jose, CA (US);
Wade Zawalski, Sunnyvale, CA (US);
Assignee:
Applied Materials Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 ; H01L 2/1302 ;
U.S. Cl.
CPC ...
B44C 1/22 ; H01L 2/1302 ;
Abstract
In the present invention, electron temperature is controlled by modifying the power delivered to the plasma by inducing or enhancing natural instabilities between the plasma and the power source. As a result, no pulse modulation of the RF power or RF generator is required. The instability is enhanced until the desired reduction in electron temperature has been achieved. In accordance with the invention, there are several modes for inducing such a natural instability.