The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2003
Filed:
May. 29, 1998
Shamouil Shamouilian, San Jose, CA (US);
Manoocher Birang, Los Gatos, CA (US);
John F. Cameron, Los Altos, CA (US);
Chandra Deshpandey, Fremont, CA (US);
Alfred Goldspeil, Watsonville, CA (US);
Ron Northrup, San Jose, CA (US);
Semyon Sherstinsky, San Francisco, CA (US);
Sasson Someth, Los Altos Hills, CA (US);
Applied Materials Inc., Santa Clara, CA (US);
Abstract
A method of fabricating an electrostatic member for holding a substrate in a process chamber containing erosive process gas. The method comprises the steps of forming an electrostatic member comprising an insulator or dielectric layer covering an electrically conductive layer, and shaping the electrostatic member to form a dielectric covered electrode and an electrical connector attached to the dielectric covered electrode to conduct charge to the dielectric covered electrode