The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2003
Filed:
Apr. 28, 2000
Merck Patent Gesellschaft, , DE;
Abstract
A solution for cleaning silicon semiconductors or silicon oxides comprising H O , NH OH and at least one component A selected from the group consisting of fluoro-containing compounds and other ammonium salts than NH OH, wherein the weight ratio of H O to H O is between 1:5 and 1:50, the weight ratio of NH OH to H O is between 1:5 and 1:50, and the molar ratio of component A to NH OH is between 1:10 and 1:5000 is disclosed. The solution can achieve the efficacy equivalent to that of the conventional RCA two-step cleaning solution within a shorter time by one step and effectively remove contaminants such as organics, dust and metals from the surfaces of silicon semiconductors and silicon oxides without using strong acids such as HCl and H SO .