The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2003
Filed:
Apr. 10, 2001
Applicant:
Inventor:
Yoshiji Takamura, Uda-gun, JP;
Assignee:
Sharp Kabushiki Kaisha, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/18238 ;
U.S. Cl.
CPC ...
H01L 2/18238 ;
Abstract
A process of manufacturing a semiconductor device having a dual gate CMOS transistor in which an nMOS transistor in the dual gate CMOS transistor is formed by the steps of: (a) forming a gate insulating film and a silicon film on a semiconductor substrate; (b) implanting n-type impurities into the silicon film in an nMOS region of the semiconductor substrate; (c) forming a conductive film on the silicon film; and (d) patterning the silicon film and the conductive film into a gate electrode.