The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2003
Filed:
Feb. 22, 2000
Daniel R. Neal, Tijeras, NM (US);
Christopher Burak, Edgewood, NM (US);
Daniel R. Hamrick, Cedar Crest, NM (US);
WaveFront Sciences, Inc., Albuquerque, NM (US);
Abstract
Metrology is performed using short, temporally resolved measurements in order to “freeze” the deformation of the object at a particular instant in time. The pulsed light beams are used to conduct metrology of moving objects and objects which are moved relative to the detector for measurement thereof. The motion may be translational, spiral and/or rotational. The duty cycle of the light source may be varied to in accordance with the control of the operation of the detector to perform metrology using a reduced total exposure of an object, while increasing the amount of light available for the measurement.