The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2003
Filed:
Apr. 01, 2002
Applicant:
Inventors:
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01R 3/302 ;
U.S. Cl.
CPC ...
G01R 3/302 ;
Abstract
It is an object to obtain a scanning probe microscope capable of effectively suppressing a reduction in precision in a measurement. A conductive probe ( C) has such a pyramid structure as to be expanded from a tip portion to a bottom surface (a surface on which a cantilever ( ) is to be formed) and a semiconductor integrated circuit ( ) is formed in a side surface of the conductive probe ( C). An amplifying circuit ( ) to be the semiconductor integrated circuit ( ) amplifies an electrical characteristic signal given from the conductive probe ( C) to send the electrical characteristic signal to a signal processor ( ) through a conductive cantilever ( C) and a signal cable ( ).