The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2003
Filed:
Dec. 20, 1999
Applicant:
Inventors:
Ryuichi Miura, Chiba-ken, JP;
Kazuhiko Tomaru, Gunma-ken, JP;
Tsutomu Yoneyama, Gunma-ken, JP;
Ryuichi Handa, Gunma-Ken, JP;
Assignee:
Other;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05H 3/02 ; G21K 5/10 ; G01N 3/02 ; F28F 7/00 ;
U.S. Cl.
CPC ...
H05H 3/02 ; G21K 5/10 ; G01N 3/02 ; F28F 7/00 ;
Abstract
Wafer holders disposed in the target chamber of an ion implantation apparatus, with each of the wafer holders comprising a wafer mount and an electrically conductive elastic body that is laid on the wafer mount and has a surface for holding a wafer thereon.