The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2003
Filed:
Feb. 26, 2001
Osamu Takaoka, Chiba, JP;
Kazuo Aita, Chiba, JP;
Seiko Instruments Inc., , JP;
Abstract
In the present invention, a dot matrix taking a spot of an ion beam at a processing surface as one dot is set at the processing surface, the presence or absence of secondary charged particles, indicating the presence of a black defect, discharged from a plurality of dots including a noted dot and associated peripheral dots is detected while eliminating black defects by irradiating each dot of a processing region with an ion beam for a fixed time, calculating a physical quantity corresponding to this presence based on this detection information, and determining completion of processing of this noted dot when this value is less than or equal to a reference value.