The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2003
Filed:
Jul. 02, 2001
Applicant:
Inventors:
Richard Wu, Hsinchu, TW;
Shih-Jen Chang, Hsin-Chu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd, Hsin Chu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01M 3/00 ;
U.S. Cl.
CPC ...
G01M 3/00 ;
Abstract
An apparatus and a method for testing permeability of a clean room garment material are described. The apparatus is constructed by a flow regulator, a flow meter, a sample holder and a quantitative tube that is equipped with a fluid reservoir for generating a bubble through the tube. The components of the apparatus can be readily obtained and the apparatus can be constructed at low cost. The method for testing air permeability can be conducted easily by utilizing the present invention novel apparatus in a factory environment without elaborate and expensive equipment.