The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 01, 2003

Filed:

Feb. 09, 2001
Applicant:
Inventors:

William R. Tonti, Essex Junction, VT (US);

Claude L. Bertin, South Burlington, VT (US);

Albert Y. Kao, Colchester, VT (US);

Jerzy M. Zalesinski, Essex Junction, VT (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 3/10203 ;
U.S. Cl.
CPC ...
H01L 3/10203 ;
Abstract

A simple, low-cost package consisting of a plurality of charge-coupled devices (CCD) having a transparent cover integrated to the CCDs is described. Interconnecting wires having a fine pitch are defined on the cover away from the light sensitive area of the CCDs to provide enhanced wiring capability. The cover is constructed on the same semiconductor wafer containing the CCDs, which are preferably arranged in a matrix formation, allowing the wafer to be diced into individual chips having any desired number of CCDs, all of which are protected by the integrated transparent cover facing the light sensitive surface of the CCDs. This structure has the further advantage of reducing defects by mounting the cover before dicing and handling the individual chips only after the cover window is already in place. Dicping width control is achieved using oxide trench as an etch channel. The structure described has a further advantage of providing a rigid thermally matched system while providing a strong mechanical support to the CCDs thus packaged.


Find Patent Forward Citations

Loading…