The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2003
Filed:
Jul. 06, 2000
Applicant:
Inventors:
Hisatoshi Otsuka, Nakakubiki-gun, JP;
Kazuo Shirota, Nakakubiki-gun, JP;
Akira Fujinoki, Koriyama, JP;
Assignee:
Other;
Primary Examiner:
Int. Cl.
CPC ...
C03B 1/909 ; C03C 3/06 ;
U.S. Cl.
CPC ...
C03B 1/909 ; C03C 3/06 ;
Abstract
A synthetic quartz glass member having (i) a change of transmittance at 193 nm of up to 0.002 cm as expressed in extinction coefficient when 4×10 shots of ArF excimer laser light are irradiated at 2 mJ/cm /pulse, (ii) an initial transmittance of at least 99.6% at 193 nm, (iii) a hydrogen molecule content of at least 5×10 molecules/cm , (iv) a refractive index amplitude of up to 1×10 , and (v) a birefringence of up to 1 nm/cm finds use in an excimer laser because it experiences a minimized change of light transmittance.