The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2003
Filed:
Mar. 24, 1999
Kiyofumi Sakaguchi, Yokohama, JP;
Takao Yonehara, Atsugi, JP;
Kazuaki Omi, Yokohama, JP;
Kazutaka Yanagita, Yokohama, JP;
Toshikazu Miyakogawa, Ebina, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
This invention is to prevent a substrate from dropping when it is transferred/received to/from a separating apparatus. The support surfaces of substrate holding portions ( ) are made horizontal, and a substrate ( ) to be separated is mounted on one substrate holding portion ( ) in a horizontal state ( A). The substrate holding portions ( ) are pivoted about rotary shafts ( ), respectively, to make the support surfaces of the substrate holding portions ( ) vertical so that the substrate ( ) is sandwiched by the substrate holding portions ( ) ( B). The substrate holding portions ( ) are rotated about rotary shafts ( ), respectively, and simultaneously, high-pressure, high-speed water is ejected from an ejection nozzle ( ) to separate the substrate ( ) into two substrates ( ). The substrate holding portions ( ) are pivoted about the rotary shafts ( ), respectively, to make the support surfaces horizontal ( C). With this arrangement, the substrate can be supported from the lower side and transferred in the horizontal state.