The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2003
Filed:
Jan. 21, 2000
Masayuki Toda, Yonezawa-shi, Yamagata-ken 992-0026, JP;
Masaki Kusuhara, Chuo-ku, JP;
Mikio Doi, Chuo-ku, JP;
Masaru Umeda, Chuo-ku, JP;
Mitsuru Fukagawa, Chuo-ku, JP;
Yoichi Kanno, Miyagi-ken, JP;
Osamu Uchisawa, Miyagi-ken, JP;
Kohei Yamamoto, Miyagi-ken, JP;
Toshikatu Meguro, Miyagi-ken, JP;
Other;
Abstract
Disclosed is a vaporizer constituted of a dispersing section and a vaporizing section The dispersing section comprises a gas introduction port for introducing a carrier gas under pressure into a gas passage, means for feeding raw material solutions and to the gas passage, and a gas outlet for delivering the carrier gas containing the raw material solutions to the vaporizing section The vaporizing section comprises a vaporizing tube having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet of the dispersing section and heating means for heating the vaporizing tube The vaporizing section serves to heat and vaporize the raw material solution containing carrier gas delivered from the dispersing section The dispersing section includes a dispersing section body having a cylindrical hollow portion, and a rod having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod has a spiral groove formed in the external periphery closer to the vaporizing section the rod being inserted into the cylindrical hollow portion.