The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2003
Filed:
May. 22, 2001
Applicant:
Inventors:
Ilya Grodnensky, Foster City, CA (US);
Eric R. Johnson, Los Gatos, CA (US);
Steve Slonaker, San Mateo, CA (US);
Assignee:
Nikon Precision, Inc., Belmont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01B 1/102 ;
U.S. Cl.
CPC ...
G01B 1/102 ;
Abstract
Increased accuracy of measurement of variation of a critical dimension is achieved through measurement of area of a test mark by detection of intensity of radiation such as broadband light with which at least a portion of a test mark is imaged. The test mark is preferably formed by partial lithographic exposures of overlapping features, preferably lines having a width approximating a critical dimension of interest and at a shallow angle to each other such that the test mark has the shape of a parallelogram or rhombus.