The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2003
Filed:
Mar. 23, 2001
Shunji Nakamura, Kawasaki, JP;
Masatoshi Fukuda, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
Insulation films having a contact hole are formed on a substrate. A dummy plug is formed in the contact hole Insulation films are formed on the insulation film An opening for exposing at least a part of the dummy plug is formed in the insulation films The dummy plug is selectively removed through the opening A storage electrode is formed in the contact hole and the opening The insulation film is selectively removed. A dielectric film and a plate electrode are formed on the storage electrode Whereby, without an extra support for supporting the storage electrode the storage electrode is prevented form falling down or peeling off, and defective contact and breakage of the lower structure due to disalignment can be precluded.