The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2003
Filed:
Mar. 07, 2001
Applicant:
Inventors:
Luc Ouellet, Granby, CA;
Manuel Grondin, Granby, CA;
Assignee:
Dalsa Semiconductor Inc., Waterloo, CA;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/640 ; C23C 1/650 ; C23C 1/656 ; G02B 6/10 ; B05D 3/02 ;
U.S. Cl.
CPC ...
C23C 1/640 ; C23C 1/650 ; C23C 1/656 ; G02B 6/10 ; B05D 3/02 ;
Abstract
An improved high temperature chemical treatment of deposited silica films wherein they are subjected to a reactive ambient comprising hydrogen and oxygen atoms. This method results in better elimination of residual undesirable oscillators so as to provide improved optical quality silica waveguides with reduced optical absorption.