The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2003
Filed:
Feb. 27, 2001
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
In a process control method, when T +Tw+T <Td is satisfied, where a time obtained by adding a conveyance time from a hold stocker to the pre-treatment processing equipment to a waiting time until start of a pre-treatment is T , treatment time in the pre-treatment processing equipment is Tw, storage time from completion of the process in the pre-treatment processing equipment to starting of charging into a post-treatment is T , and treatment time in the post-treatment equipment is Td, a point of time TR when the treatment of a lot is started in the post-treatment equipment is utilized as a trigger, and a lot is charged after a predetermined standby time Ta so that a point of time when the treatment time Td of the lot has been completed in the post-treatment equipment may almost coincide with the point of time when the treatment time Td of the lot is started in the post-treatment equipment.