Graphic method

Abstract

A graphic method for preparing a surface map used to synthesize a masking layer. The proposed structures on a semiconductor surface are mapped as trapezoidal figures on a numerical grid. The first grouping step groups trapezoids into a plurality of groups based on Ymin, and groups are then internally sorted based on Xmin. A to-be-judged group is selected. A intra-group judging step uses a trapezoid as a to-be-judged figure in order of sorting, and trapezoids sorted after the to-be-judged trapezoid as a to-be-compared figures successively in order of sorting, determining if there is intersection and if so incrementally moving the to-be-compared figure, and repetitively executing an intersection judgment processing until there is no intersection or until the to-be-compared figure disappears. An inter-group judging step for using any one of said group sorted before the group-to-be-judged as a to-be-compared group in order of sorting, comparing the Y-values of the lower sides of the trapezoids in the group-a to-be-judged with a maximum Y-coordinate value (Ymax) of a trapezoid in the group-to-be-compared, and executing the intersection judgment processing, and incremental moving, between the trapezoid to be judged and the trapezoid to be compared only when the Y-value of the lower side is smaller than the Ymax. The process is from the step of selecting a group to be judged until there is no group remaining to be judged.