The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2003
Filed:
Jan. 17, 2002
Applicant:
Inventors:
Ming C. Wu, Pacific Palisades, CA (US);
Li Fan, Rowland Heights, CA (US);
Anis Husain, San Diego, CA (US);
Assignee:
OMM, Inc., San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/26 ;
U.S. Cl.
CPC ...
G02B 6/26 ;
Abstract
In at least one embodiment, a MEMS optomechanical switch in accordance with the present invention includes a substrate, a signal source capable of transmitting a radiation signal, an electrode coupled to the substrate, and a micromachined plate rotatably coupled to the substrate about a pivot axis. The switch further includes a micromirror having an orientated reflective surface, mounted to the micromachined plate and an electrical source coupled to at least one of the electrode and the micromachined plate.