The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2003
Filed:
Aug. 11, 2000
Applicant:
Inventors:
Katsuhiko Murakami, Kawasaki, JP;
Hiroyuki Kondo, Tsukuba, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K 7/00 ;
U.S. Cl.
CPC ...
G21K 7/00 ;
Abstract
A reflective-type soft X-ray microscope includes an image-focusing optical system including a concave mirror and a convex mirror, an illumination optical system that has a light source, a filter, and a focusing optical element for transmitting an illumination light beam, and a stage mechanism that carries and moves a sample under observation. In the reflective-type soft X-ray microscope, the concave mirror has at least one opening part for transmitting the illuminating light beam that illuminates the sample, and a reflected image of the sample is focused on a soft X-ray image detector by the image-focusing optical system.