The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2003
Filed:
Jul. 24, 2000
Akira Tanaka, Toyko, JP;
Kazuo Ohkubo, Toyko, JP;
Yoko Suzuki, Toyko, JP;
Hideaki Sekiguchi, Toyko, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A cleanbox that can prevent contamination from not only external sources but also from within the cleanbox from such sources as substrates and internal components of the cleanbox, includes a casing container ( ) formed by a container main body ( ) and a lid member ( ) for hermetically sealing a top opening section of the container main body; a dividing wall ( ) for forming circulation paths having an upstreaming path and a downstreaming paths within the casing container; a substrate holding section ( ) disposed in the upstreaming path for holding broad surfaces of substrates (W) approximately parallel to the upstreaming path; an air filter ( ) and a gas removal filter ( ) disposed upstream in relation to the substrate holding section in the upstreaming path; and a motor-driven fan ( ) housed in the casing container for producing air streams circulating in the circulating paths.