The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2003
Filed:
Nov. 19, 2001
Takashi Saiki, Kawasaki, JP;
Akira Yamanoue, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A semiconductor device having a semiconductor substrate including semiconductor elements and an underlying wiring layer, and an underlying insulating layer covering the underlying wiring layer. Via conductors are also included and are filled in via holes extending through the underlying insulating layer and reaching the underlying wiring layer. Further, an insulating stack layer formed on the underlying insulating layer and covering the via conductors, the insulating stack layer including a first and a second insulating layer having different etching characteristic, a pad groove formed through the insulating stack layer, defining a pad region in which the via conductors are exposed, the pad region including therein at least an etching enhancing remaining insulation layer pattern and a pad conductor filled in the pad groove.