The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2003
Filed:
Dec. 12, 2000
Hyun-chul Kim, Shihung, KR;
Chong-man Yun, Seoul, KR;
Kyu-hyun Lee, Bucheon, KR;
Ju-il Kim, Bucheon, KR;
Fairchild Korea Semiconductor Ltd., Puchon, KR;
Abstract
A trench-gate power semiconductor device and a method for fabricating the same are provided. The trench-gate power semiconductor device includes a semiconductor substrate of a first conductivity type used as a collector region, a buffer layer of a second conductivity type formed on the semiconductor substrate, a drift region of a second conductivity type formed on the buffer layer, a base region of a first conductivity type formed on the drift region, a gate dielectric layer formed on the surface of a trench which is formed down to a predetermined depth into the drift region and surrounds the base region, a gate electrode formed on the gate dielectric layer, an emitter region of a second conductivity type contacting both the surface of the base region and an upper sidewall of the trench in the base region, the emitter region contains a first emitter region formed so as to be extended to a predetermined length along the sidewall of the trench and to be alternately arranged in the base region and a second emitter region extended to a predetermined length from the first emitter to the center of the base region, an emitter electrode formed so as to be electrically connected to the first emitter region through a part of the second emitter region, and a collector electrode formed so as to be electrically connected to the semiconductor substrate.