The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2003
Filed:
Feb. 28, 2002
Masakazu Sugaya, Kawasaki, JP;
Fumio Murai, Nishitama-gun, JP;
Yutaka Kaneko, Hachioji, JP;
Masafumi Kanetomo, Suginami-ku, JP;
Shigeki Hirasawa, Ishioka, JP;
Tomoji Watanabe, Tsuchiura, JP;
Tatuharu Yamamoto, Higashimurayama, JP;
Katsuhiro Kuroda, Hachioji, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
So as to provide a substrate temperature control system capable of unifying the temperature of the substrate and capable of shortening the temperature elevation time (temperature lowering time), the substrate temperature control system is equipped with a temperature control plate (heating or cooling plate) having a plurality of projections on the surface and serving to set the temperature of the substrate, and a chuck mechanism to fix the substrate in contact to a plurality of the projections by chucking the substrate toward the direction of the temperature control plate.