The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2003
Filed:
Mar. 03, 2000
Phillip H. Malyak, Canton, MA (US);
John S. Berg, Bellingham, MA (US);
Angela Holh-Abi Chedid, Beverly, MA (US);
David L. Kent, Framingham, MA (US);
John M. Watson, Haverhill, MA (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
Three aspect of a interferometer system for testing and characterizing micro-optical components an automatic system for testing a plurality of micro-optical components in sequence, a special holding device including a vacuum chuck arrangement allows for individual micro-optical components to be picked up and held during testing, and a modified Linnik objective is used with short coherent light and preferably a opaque reference sphere to carry out reflection tests on micro-optical component having at least one curved surface.