The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2003
Filed:
Aug. 08, 2000
Tsung-Chi Hsieh, Tanishui, TW;
Taiwan Semiconductor Manufacturing Co., Ltd, Hsin Chu, TW;
Abstract
A liquid supply/drain conduit system that is equipped with an inner leakage detector and a liquid process tank that is equipped with such liquid supply/drain conduit system are disclosed. The liquid supply/drain conduit system includes a first conduit for feeding a liquid into an inlet of a first valve of the normal-closed type, a second conduit of T-shape that has a horizontal portion and a vertical portion, the horizontal portion of the second conduit flows a liquid from an outlet of the first valve into a reservoir tank. The second valve of the normal-open type has an inlet and an outlet, the inlet is situated in relation to the first valve in such a way that it receives through a vertical portion of the second conduit a leaked flow of liquid by gravity when the normal-closed first valve failed to close. A liquid detector is further provided for detecting a leaked flow of liquid through the second valve. The leakage detector may optionally include an alarm system to be activated when a leakage flow is detected. The leakage detector may further send a signal to a process controller for alerting a machine operator of the leakage status of the liquid supply/drain conduit system.