The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2003
Filed:
Aug. 25, 1999
Masayuki Kuwabara, Machida, JP;
Tokyo Seimitsu Co., Ltd., Tokyo, JP;
Abstract
In a pattern comparison system based on double detection, images of areas in a plurality of identical patterns arrayed in rows and columns on an inspected object are each compared with images of two or more nearby areas. Defects are detected based on the results of comparison. The pattern comparison system includes a scanning unit, a storage unit, and a comparison unit. The scanning unit relatively scans the inspected object in a combination of positive and negative directions along the rows or columns so as to produce images of areas on the inspected objects. The produced images of areas are temporarily stored in the storage unit. The comparison unit compares a produced image of each area with the other stored images of two or more nearby areas which have been produced by scanning dice in the same direction.