The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2003
Filed:
Feb. 05, 2002
Applicant:
Inventors:
Hiroshi Fujioka, Tokyo, JP;
Masaharu Oshima, Tokyo, JP;
Assignee:
Semiconductor Technology Academic Research Center, Kanagawa, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01N 2/306 ;
U.S. Cl.
CPC ...
G01N 2/306 ;
Abstract
Evaluating electrical properties of a semiconductor device by measuring and analyzing a junction capacitance of a semiconductor provided in the semiconductor device and a transient change of the junction capacitance while applying an X-ray beam to the semiconductor device intermittently, and evaluating a structure and electron states of the semiconductor by measuring and analyzing an energy spectrum of an X-ray beam absorbed into an element present in the semiconductor while applying an X-ray beam to the semiconductor device continuously.