The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 28, 2003

Filed:

Aug. 08, 2000
Applicant:
Inventors:

Alfred Johann Peter Haszler, Valendar, DE;

Hormoz Ghaziary, Los Gatos, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 2/322 ;
U.S. Cl.
CPC ...
G01N 2/322 ;
Abstract

The invention relates to a method of analyzing a specimen comprising a compound material by X-ray fluorescence analysis wherein a beam of polychromatic primary X-rays is generated in an X-ray tube by conversion of electric current into X-rays, and said beam is directed at the specimen, and wherein the element specific fluorescent X-rays are selectively detected using means for detection and an intensity of said fluorescent X-rays is determined. After the electric current is applied to the X-ray tube and the intensity of element specific fluorescent X-rays is determined, a second intensity of the element specific fluorescent X-rays is determined while applying an electric current with a different value than the previous electric current, and at least the relative abundance of the chemical element present in the compound material is then determined using the values of both intensities. The thickness of the first layer can be determined simultaneously.


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