The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2003
Filed:
Mar. 28, 2002
Silicon Integrated Systems Corp., Hsin Chu, TW;
Abstract
A metal capacitor in damascene structures is provided. A first Cu wire and a second Cu wire are located in a first insulator. A first sealing layer is located on the first and the second Cu wires. A second insulator is located on the first sealing layer. A third insulator is located on the second insulator, and acting as an etch stop layer. A first Cu plug and a second Cu plug are located in the first sealing layer, the second insulator and the third insulator. A capacitor is located on the third insulator and the first Cu plug, the capacitor having an upper electrode, a capacitor dielectric and a bottom electrode with the same pattern each other, wherein the bottom electrode is connected to the first Cu wire through the first Cu plug. A conducting wire is located on the third insulator and the second Cu plug, wherein the conducting wire is connected to the second Cu wire through the second Cu plug. A fourth insulator is located on the conducting wire. A fifth insulator with a flat surface is located on the upper electrode, the fourth insulator and the third insulator. A plurality of dual damascene structures including a third plug, a fourth Cu plug, a third Cu wire and a fourth Cu wire are located in the fifth insulator, wherein an upper electrode of the capacitor is connected to the third Cu wire through the third Cu plug, and the conducting wire is connected to the fourth Cu wire through the fourth Cu plug. A second sealing layer is located on the third and fourth Cu wires.