The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2003
Filed:
Sep. 07, 2001
Applicant:
Inventors:
Yuji Harada, Nakakubiki-gun, JP;
Jun Hatakeyama, Nakakubiki-gun, JP;
Jun Watanabe, Nakakubiki-gun, JP;
Yoshio Kawai, Nakakubiki-gun, JP;
Masaru Sasago, Hirakata, JP;
Masayuki Endo, Izumi, JP;
Shinji Kishimura, Itami, JP;
Michitaka Ootani, Kawagoe, JP;
Satoru Miyazawa, Kawagoe, JP;
Kentaro Tsutsumi, Kawagoe, JP;
Kazuhiko Maeda, Chiyoda, JP;
Assignee:
Other;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 ; C08F / ;
U.S. Cl.
CPC ...
G03F 7/004 ; C08F / ;
Abstract
An acrylic resin containing hexafluoroisopropanol units has high transmittance to VUV radiation. A resist composition using the resin as a base polymer has high transparency, substrate adhesion, alkali developability and acid-elimination capability and is suited for lithographic microprocessing.